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    • Gas Purifiers
    • Waste gas cleaner for semiconductors
    • Pressure Sensors, Flow Sensors, Level Gagese
    • Other semiconductor gas purifying eauipment
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Gas purifiers

The semiconductor fabrication process involves a variety of source gases and carrier gases. For the fabrication of higher quality semiconductors, our complete line of gas purifiers allows the user to select the optimal solution for the type of gas used.

  • Normal-temperature adsorption gas purifier

  • Palladium alloy memrane permeation hydrogen gas purifier

  • Getter-type gas purifier

  • Normal-temperature adsorption air purifier
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Products
  • Gas Purifiers
    • Normal-temperature adsorption gas purifier
    • Palladium alloy memrane permeation hydrogen gas purifier
    • Getter-type gas purifier
    • Normal-temperature adsorption air purifier
  • Waste gas cleaner for semiconductors
    • Pioclean Cartridge/Detecting agent
    • Waste gas cleaner for semiconductors
    • Emargency Safety Equipment
    • Combustion type waste gas cleaner
    • PFC catalyst thermal decomposition equipment
    • Ammonia decompositionand detoxifying equipment
    • Adsorption and regeneration type waste gas cleaner
    • Thermal detoxifying equipment
  • Other semiconductor gas purifying eauipment
    • PIOFINE-cartridge
    • Line filters
    • Mass Flow Controller
  • Waste gas cleaner for semiconductors
    • Pioclean Cartridge/Detecting agent
    • Waste gas cleaner for semiconductors
    • Emargency Safety Equipment
    • Combustion type waste gas cleaner
    • PFC catalyst thermal decomposition equipment
    • Ammonia decompositionand detoxifying equipment
    • Adsorption and regeneration type waste gas cleaner
    • Thermal detoxifying equipment
  • Pressure Sensors, Flow Sensors, Level Gagese
Corporate Info
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  • Company Profile
  • History
  • News
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