Waste gas cleaner for semiconductors

With our accumulated know-how and field-proven skills related to waste gas treatment essential to the manufacturing of semiconductors, and thanks to a variety of technical innovations and cutting-edge equipment, we can meet increasingly diversified needs.


PIOCLEAN® detoxifying agents chemically adsorb any harmful components and fully remove the harmful substances from waste gas.
As dry agents, Pioclean agents have a number of special characteristics and advantages and are extremely easy to handle.


  • The cartridges chemically adsorb harmful substances in the hydrides and hydrolysable chlorine- and fluorine-based gases to reduce the concentrations to the TLV(threshold limit value )or less.
  • The cartridges are compact and lightweight, saving a substantial amount of space and installation time.
  • Cartridges made of stainless steel and FRP are available. Select according to the intended purpose of use.
  • The use of a dry type detoxifying agent also eliminates the need for a dedicated suction blower due to the smaller pressure loss.
  • Color changes by the sensitive detecting agent can pinpoint precisely the timing of replacement.
  • A valve is installed as standard at the inlet and outlet, improving safety when installing and removing

Example of detoxification agent color change

Stainless steel cartridge *1

Model Dimensions
Nozzle joint*3 Max. flow rate
PCS-08A-□*2 Ø60.5×540 NW20/25 8
PCS-3A-□ Ø114.3×708 NW20/25 30
PCS-7A-□ Ø165.2×778 NW20/25 60
PCS-12A-□ Ø216.3×894 NW32/40 110
PCS-21A-□ Ø267.4×894 NW32/40 160
PCS-31B-□ Ø318.5×1,128 NW32/40 230
PCS-62B-□ Ø406.4×1,313 NW50 400

*1 Anti-corrosion inner coating is available.

FRP steel cartridge

Model Dimensions
Nozzle joint*3 Max. flow rate
PCF-4B-□*2 Ø135×716 NW20/25 40
PCF-10B-□ Ø210×805 NW20/25 100
PCF-20B-□ Ø260×992 NW32/40 150
PCF-50B-□ Ø410×1,246 NW32/40 400
PCF-100B-□ Ø512×1,339 NW50 600
PCF-200B-□ Ø712×1,597 NW50 1,200

*2 in the boxes, Pioclean types are entered in code form.
*3 The nozzle joint figures indicate the cartridge valve joint size.

Related products

Allows safe replacement of exhausted detoxifying columns because they are the cartridge type.

This equipment (series) is designed to detoxify any harmful waste gas emissions cost-effectively and safe through the combination of a simple flow piping system and a PIOCLEAN® cartridge of extremely high throughput.