Waste gas cleaner for semiconductors

With our accumulated know-how and field-proven skills related to waste gas treatment essential to the manufacturing of semiconductors, and thanks to a variety of technical innovations and cutting-edge equipment, we can meet increasingly diversified needs.

NF3 waste gas cleaner MODEL-WGH


  • Decomposes NF3 to TLV(10 ppm ) or less in concentration.
  • Ensures that the gas at the outlet is free from CO2, NOx and HF.
  • Allows detoxification at low-temperature operation starting at 270℃.
  • Eliminates the need for a secondary scrubber since the fluorine compound produced after decomposition of NF3 is fixed in the cartridge.(No need to install any wastewater treatment facility).
  • Allows safe replacement of exhausted detoxifying columns because they are the cartridge type.


Equipment specifications

Dimensions W×D×H(mm) 1,200×800×2,000
Equipment weight(kg) 500
Power voltage(kVA) 17
Substitution gasType Nitrogen
Supplied pressure 0.4~0.7MPa
Amount used 100(ℓ/min)nor
Gas for measurement gasType Nitrogen or dry air
Supplied pressure 0.4~0.7MPa
Amount used small amount


Catalyst Thermal Decomposition Equipment MODEL-WGB


  • Suited for the manufacturing process of highly dielectric and strong dielectric thin films.
  • Safely removes VOC (such as THF and butyl acetate), Pb, Zr, Ti and other DPM, and organo-metallic complexes by oxidization.
  • Allows the full oxidization at the air-mixing ratio equal to or lower than the lower explosive limit of organic solvent at a temperature range exceeding 250℃ with the aid of the action of an oxidizing catalyst.
  • Eliminates the need for propane and other combustion fuels for the heater heating system, thereby reducing the emissions of CO2.
  • Prevents the emission of produced metallic oxides to outside the system, by the installation of filters.
  • Ensures safety through monitoring of pressures and temperatures.

Equipment specifications

Dimensions W×D×H(mm) 1,400×1,100×2,000
Equipment weight(kg) 850
Power voltage(kVA) 18
Air gasType Air
Supplied pressure 0.5~0.7MPa
Amount used 200~300
Substitution gas gasType Nitrogen
Supplied pressure 0.4~0.7MPa
Amount used 40(ℓ/min)nor
Gas for measurement gasType Nitrogen or dry air
Supplied pressure 0.4~0.7MPa
Amount used small amount

Related products

Because the adsorption columns are regenerated with water, the catridge lifetimes are long.

PIOCLEAN® detoxifying agents chemically adsorb any harmful components and fully remove the harmful substances from waste gas.