With our accumulated know-how and field-proven skills related to waste gas treatment essential to the manufacturing of semiconductors, and thanks to a variety of technical innovations and cutting-edge equipment, we can meet increasingly diversified needs.
PFC catalyst thermal decomposition equipment MODEL-WGF
Allows full decomposition of CF4, C2F6, C5F8 and other PFC(perfluorocarbon), and SF6 and HFC. Eliminates the need for propane and other combustion fuels for the heater heating system, thereby minimizing the emissions of CO2.
- Eliminates the need for any ancillary facility. Offers space-saving and lower-cost features.
- Ensures improved safety(flame and fuel are not necessary.)
- No NOx generation due to the relatively lower decomposition temperature.
- Requires no after-treatment equipment such as a wet scrubber since the catalyst component is responsible for adsorption and fixation of fluorine. Also keeps the system piping free from any possible corrosion.
|Max. processing capacity
|80(including added air)|
|Max. PFC concentration(%)||1.0*1|
|PFC decomposition||99.9% or higher|
|CF4 processing capacity
|Target harmful gases||CF4、C2F6、SF6、CO、CHF3等|
*1 The CO concentration is 4.0%.
Flow Diagram (With Pretreatment Column)
(No pretreatment column)
(With pretreatment column)
Ensures consistently stable flames independently from the variable flow rates of waste gas, due to the separate design of the combustion nozzle and secondary combustion chamber.