Products
Gas purifiers

The semiconductor fabrication process involves a variety of source gases and carrier gases. For the fabrication of higher quality semiconductors, our complete line of gas purifiers allows the user to select the optimal solution for the type of gas used.

Getter-type gas purifier MODEL-UHG/URT

  • Allows purification of gas to ultra-high purity temperatures with the aid of our originally developed getter.
  • Allows removal of nitrogen(N2), which is difficult to remove by Normal-temperature adsorption purifiers.
  • Indication of the total purified gas volume and the total purification time of the reaction column (getter), allow the operator to check the remaining purification capacity of the column.
  • The getter lifetime is long. (URT: 20,000 hr UHG: 9,000 hr)
  • Allows setting ON/OFF the reaction column heater at predetermined timing with week-based operation programming.(URT type)

Equipment specifications

Model UHG URT
Applicable gas H2 Ar,He,Xe,etc.
Inlet Outlet Inlet Outlet
Max. pressure(MPa) 0.8 Under ⊿0.1 0.8 Under ⊿0.1
Temp.(℃) 5～35 5～35 5～35 5～35
O2 5,000 ≦1ppb Standard
※0.1 Non-standard		 100 ≦1ppb Standard
※0.1 Non-standard
CO 1,000 ≦1ppb Standard
※0.1 Non-standard		 100 ≦1ppb Standard
※0.1 Non-standard
CO2 500 ≦1ppb Standard
※0.1 Non-standard		 100 ≦1ppb Standard
※0.1 Non-standard
Impurities
(vol.ppb)		 H2 - - 100 ≦1ppb Standard
※0.1 Non-standard
CH4 100 ≦5ppb Standard
※1ppb Non-standard		 100 ≦1ppb Standard
※0.1 Non-standard
N2 5,000 ≦1ppb Standard
※0.1 Non-standard		 5,000 ≦1ppb Standard
※0.1 Non-standard
H2O 10,000 ≦1ppb Standard
※0.1 Non-standard		 2,500 ≦1ppb Standard
※0.1 Non-standard
Particle ≧0.1µm
≦1pcs/0.0283m3		 ≧0.1µm
≦1pcs/0.0283m3

*Please consult with us about the available flow rates,
*The purification capacity for Models URT and UHG refers to the life expectancy of the getter. In practice, the getter remains effective for 20,000 hours(URT) or 9,000 hours (UHG) total operating time at the allowable maximum flow rate and inlet gas impurities listed above.
The Getter reaction column cannot be regenerated and must be replaced when it reaches the lifetime.
(Please consult separately with us concerning use overseas.)

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