{"id":561,"date":"2021-11-10T14:24:27","date_gmt":"2021-11-10T05:24:27","guid":{"rendered":"https:\/\/www.japan-pionics.co.jp\/?page_id=561"},"modified":"2021-11-10T14:24:27","modified_gmt":"2021-11-10T05:24:27","slug":"heat","status":"publish","type":"page","link":"https:\/\/www.japan-pionics.co.jp\/en\/products\/exhaust_gas\/heat\/","title":{"rendered":"NF3 waste gas cleaner MODEL-WGH"},"content":{"rendered":"<div id=\"pl-561\"  class=\"panel-layout\" ><div id=\"pg-561-0\"  class=\"panel-grid panel-has-style\" ><div class=\"page_con panel-row-style panel-row-style-for-561-0\" ><div id=\"pgc-561-0-0\"  class=\"panel-grid-cell\" ><div id=\"panel-561-0-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"0\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<h3>Features<\/h3>\n<ul>\n<li>Decomposes NF3 to TLV(10 ppm ) or less in concentration.<\/li>\n<li>Ensures that the gas at the outlet is free from CO2, NOx and HF.<\/li>\n<li>Allows detoxification at low-temperature operation starting at 270\u2103.<\/li>\n<li>Eliminates the need for a secondary scrubber since the fluorine compound produced after decomposition of NF3 is fixed in the cartridge.(No need to install any wastewater treatment facility).<\/li>\n<li>Allows safe replacement of exhausted detoxifying columns because they are the cartridge type.\n<p>&nbsp;<\/p>\n<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div><div id=\"pgc-561-0-1\"  class=\"panel-grid-cell\" ><div id=\"panel-561-0-1-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"1\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<p>\t<img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.japan-pionics.co.jp\/page\/wp-content\/uploads\/products_exhaust_gas_p08.jpg\" alt=\"\" width=\"400\" height=\"400\" class=\"alignnone size-full wp-image-26\"><\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><div id=\"pg-561-1\"  class=\"panel-grid panel-has-style\" ><div class=\"page_con panel-row-style panel-row-style-for-561-1\" ><div id=\"pgc-561-1-0\"  class=\"panel-grid-cell\" ><div id=\"panel-561-1-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"2\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<h4>Equipment specifications<\/h4>\n<div class=\"scroll\">\n<table summary=\"\u88c5\u7f6e\u4ed5\u69d8\" cellspacing=\"0\">\n<tbody>\n<tr>\n<th>Dimensions W\u00d7D\u00d7H(mm)<\/th>\n<td colspan=\"2\">1,200\u00d7800\u00d72,000<\/td>\n<\/tr>\n<tr>\n<th>Equipment weight(kg)<\/th>\n<td colspan=\"2\">500<\/td>\n<\/tr>\n<tr>\n<th>Power voltage(kVA)<\/th>\n<td colspan=\"2\">17<\/td>\n<\/tr>\n<tr>\n<th rowspan=\"3\" width=\"42%\">Substitution<\/th>\n<td width=\"18%\">gasType<\/td>\n<td width=\"40%\">Nitrogen<\/td>\n<\/tr>\n<tr>\n<td>Supplied pressure<\/td>\n<td>0.4\uff5e0.7MPa<\/td>\n<\/tr>\n<tr>\n<td>Amount used<\/td>\n<td>100(\u2113\/min)nor<\/td>\n<\/tr>\n<tr>\n<th rowspan=\"3\">Gas for measurement<\/th>\n<td>gasType<\/td>\n<td>Nitrogen or dry air<\/td>\n<\/tr>\n<tr>\n<td>Supplied pressure<\/td>\n<td>0.4\uff5e0.7MPa<\/td>\n<\/tr>\n<tr>\n<td>Amount used<\/td>\n<td>small amount<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<\/div><\/div><\/div><div id=\"pgc-561-1-1\"  class=\"panel-grid-cell\" ><div id=\"panel-561-1-1-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"3\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-661 size-full\" src=\"https:\/\/www.japan-pionics.co.jp\/page\/wp-content\/uploads\/image_heat_0102-1.gif\" alt=\"\" width=\"296\" height=\"198\"><\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><div id=\"pg-561-2\"  class=\"panel-grid panel-has-style\" ><div class=\"page_con panel-row-style panel-row-style-for-561-2\" ><div id=\"pgc-561-2-0\"  class=\"panel-grid-cell\" ><div id=\"panel-561-2-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"4\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<p>&nbsp;<\/p>\n<h1>Catalyst Thermal Decomposition Equipment MODEL-WGB<\/h1>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><div id=\"pg-561-3\"  class=\"panel-grid panel-has-style\" ><div class=\"page_con panel-row-style panel-row-style-for-561-3\" ><div id=\"pgc-561-3-0\"  class=\"panel-grid-cell\" ><div id=\"panel-561-3-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"5\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<h3>Features<\/h3>\n<ul>\n<li>Suited for the manufacturing process of highly dielectric and strong dielectric thin films.<\/li>\n<li>Safely removes VOC (such as THF and butyl acetate), Pb, Zr, Ti and other DPM, and organo-metallic complexes by oxidization.<\/li>\n<li>Allows the full oxidization at the air-mixing ratio equal to or lower than the lower explosive limit of organic solvent at a temperature range exceeding 250\u2103 with the aid of the action of an oxidizing catalyst.<\/li>\n<li>Eliminates the need for propane and other combustion fuels for the heater heating system, thereby reducing the emissions of CO2.<\/li>\n<li>Prevents the emission of produced metallic oxides to outside the system, by the installation of filters.<\/li>\n<li>Ensures safety through monitoring of pressures and temperatures.<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><div id=\"pg-561-4\"  class=\"panel-grid panel-has-style\" ><div class=\"page_con panel-row-style panel-row-style-for-561-4\" ><div id=\"pgc-561-4-0\"  class=\"panel-grid-cell\" ><div id=\"panel-561-4-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"6\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<h4>Equipment specifications<\/h4>\n<div class=\"scroll\">\n<table summary=\"\u88c5\u7f6e\u4ed5\u69d8\" cellspacing=\"0\">\n<tbody>\n<tr>\n<th>Dimensions W\u00d7D\u00d7H(mm)<\/th>\n<td colspan=\"2\">1,400\u00d71,100\u00d72,000<\/td>\n<\/tr>\n<tr>\n<th>Equipment weight(kg)<\/th>\n<td colspan=\"2\">850<\/td>\n<\/tr>\n<tr>\n<th>Power voltage(kVA)<\/th>\n<td colspan=\"2\">18<\/td>\n<\/tr>\n<tr>\n<th rowspan=\"3\" width=\"42%\">Air<\/th>\n<td width=\"18%\">gasType<\/td>\n<td width=\"40%\">Air<\/td>\n<\/tr>\n<tr>\n<td>Supplied pressure<\/td>\n<td>0.5\uff5e0.7MPa<\/td>\n<\/tr>\n<tr>\n<td>Amount used<\/td>\n<td>200\uff5e300<br \/>\n(\u2113\/min)nor<\/td>\n<\/tr>\n<tr>\n<th rowspan=\"3\">Substitution gas<\/th>\n<td>gasType<\/td>\n<td>Nitrogen<\/td>\n<\/tr>\n<tr>\n<td>Supplied pressure<\/td>\n<td>0.4\uff5e0.7MPa<\/td>\n<\/tr>\n<tr>\n<td>Amount used<\/td>\n<td>40(\u2113\/min)nor<\/td>\n<\/tr>\n<tr>\n<th rowspan=\"3\">Gas for measurement<\/th>\n<td>gasType<\/td>\n<td>Nitrogen or dry air<\/td>\n<\/tr>\n<tr>\n<td>Supplied pressure<\/td>\n<td>0.4\uff5e0.7MPa<\/td>\n<\/tr>\n<tr>\n<td>Amount used<\/td>\n<td>small amount<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<\/div><\/div><\/div><div id=\"pgc-561-4-1\"  class=\"panel-grid-cell\" ><div id=\"panel-561-4-1-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"7\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-662 size-full\" src=\"https:\/\/www.japan-pionics.co.jp\/page\/wp-content\/uploads\/image_heat_02-1.gif\" alt=\"\" width=\"296\" height=\"198\"><\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><div id=\"pg-561-5\"  class=\"panel-grid panel-has-style\" ><div class=\"page_con panel-row-style panel-row-style-for-561-5\" ><div id=\"pgc-561-5-0\"  class=\"panel-grid-cell\" ><div id=\"panel-561-5-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"8\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<h2>Related products<\/h2>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><div id=\"pg-561-6\"  class=\"panel-grid panel-has-style\" ><div class=\"cat_index_con panel-row-style panel-row-style-for-561-6\" ><div id=\"pgc-561-6-0\"  class=\"panel-grid-cell\" ><div id=\"panel-561-6-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"9\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-27\" src=\"https:\/\/www.japan-pionics.co.jp\/page\/wp-content\/uploads\/products_exhaust_gas_p07.jpg\" alt=\"\" width=\"400\" height=\"400\"><\/p>\n<ul>\n<li><a href=\"..\/..\/exhaust_gas\/wet\/\">Adsorption and regeneration type waste gas cleaner<\/a><\/li>\n<\/ul>\n<p class=\"cat_index_con_p\">Because the adsorption columns are regenerated with water, the catridge lifetimes are long.<\/p>\n<\/div>\n<\/div><\/div><\/div><div id=\"pgc-561-6-1\"  class=\"panel-grid-cell\" ><div id=\"panel-561-6-1-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"10\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-27\" src=\"https:\/\/www.japan-pionics.co.jp\/page\/wp-content\/uploads\/products_exhaust_gas_p01.jpg\" alt=\"\" width=\"400\" height=\"400\"><\/p>\n<ul>\n<li><a href=\"..\/..\/exhaust_gas\/pioclean\/\">Pioclean Cartridge\/Detecting agent<\/a><\/li>\n<\/ul>\n<p class=\"cat_index_con_p\">PIOCLEAN\u00ae detoxifying agents chemically adsorb any harmful components and fully remove the harmful substances from waste gas.<\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div>","protected":false},"excerpt":{"rendered":"<p>Features Decomposes NF3 to TLV(10 ppm ) or less in concentration. Ensures that the gas at the outlet is free from CO2, NOx and HF. Allows detoxification at low-temperature operation starting at 270\u2103. Eliminates the need for a secondary scrubber since the fluorine compound produced after decomposition of NF3 is fixed in the cartridge.(No need [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":543,"menu_order":46,"comment_status":"closed","ping_status":"closed","template":"page_cat_products_exhaust_gas.php","meta":{"_locale":"en_US","_original_post":"https:\/\/www.japan-pionics.co.jp\/page\/?page_id=81","footnotes":""},"class_list":["post-561","page","type-page","status-publish","hentry","en-US"],"_links":{"self":[{"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/pages\/561","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/comments?post=561"}],"version-history":[{"count":1,"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/pages\/561\/revisions"}],"predecessor-version":[{"id":562,"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/pages\/561\/revisions\/562"}],"up":[{"embeddable":true,"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/pages\/543"}],"wp:attachment":[{"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/media?parent=561"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}