{"id":552,"date":"2021-11-10T14:20:22","date_gmt":"2021-11-10T05:20:22","guid":{"rendered":"https:\/\/www.japan-pionics.co.jp\/?page_id=552"},"modified":"2021-11-10T14:20:22","modified_gmt":"2021-11-10T05:20:22","slug":"combustion","status":"publish","type":"page","link":"https:\/\/www.japan-pionics.co.jp\/en\/products\/exhaust_gas\/combustion\/","title":{"rendered":"Combustion-type Waste Gas Cleaner MODEL-WGT"},"content":{"rendered":"<div id=\"pl-552\"  class=\"panel-layout\" ><div id=\"pg-552-0\"  class=\"panel-grid panel-has-style\" ><div class=\"page_con panel-row-style panel-row-style-for-552-0\" ><div id=\"pgc-552-0-0\"  class=\"panel-grid-cell\" ><div id=\"panel-552-0-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"0\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<p class=\"page_con_p\">The equipment is designed to detoxify the waste gases of hydrogen compounds such as SiH4 and fluorine compunds such as C2F6, WF6 generated from the semiconductor manufacturing equipment through thermal decomposition using the heated exhaust of a combustion burner.<br \/>\nThe byproducts of thermal decomposition (SiO2 powder, acid gas, etc.) are removed by the wet scrubber in the equipment.<\/p>\n<h3>Features<\/h3>\n<ul>\n<li>Ensures consistently stable flames independently from the variable flow rates of waste gas, due to the separate design of the combustion nozzle and secondary combustion chamber.<\/li>\n<li>Accommodates a waste gas flow rate of up to 500 \/min (supports up to 4 ports).<\/li>\n<li>Forms an air curtain on the sidewall of the secondary combustion chamber and prevents possible adhesion of byproducts by combustion.<\/li>\n<li>Adopts direct cooling by means of a cooling water spray immediately after combustion treatment. This reduces the amount of space required.<\/li>\n<li>Prevents possible problems in the circulating pump caused by SiO2 powder and slurry with the aid of constant water circulation in the tank.<\/li>\n<li>Offers improved safety thanks to the installation of various sensors.<\/li>\n<li>Easy to identify the progress of treatment and operating conditions through the touch panel.<\/li>\n<\/ul>\n<\/div>\n<\/div><\/div><\/div><div id=\"pgc-552-0-1\"  class=\"panel-grid-cell\" ><div id=\"panel-552-0-1-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"1\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<p>\t<img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.japan-pionics.co.jp\/page\/wp-content\/uploads\/products_exhaust_gas_p04.jpg\" alt=\"\" width=\"400\" height=\"400\" class=\"alignnone size-full wp-image-26\"><\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><div id=\"pg-552-1\"  class=\"panel-grid panel-has-style\" ><div class=\"page_con panel-row-style panel-row-style-for-552-1\" ><div id=\"pgc-552-1-0\"  class=\"panel-grid-cell\" ><div id=\"panel-552-1-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child\" data-index=\"2\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<h4>System Performance and Utility<\/h4>\n<div class=\"scroll\">\n<table summary=\"\u6027\u80fd\uff06\u30e6\u30fc\u30c6\u30a3\u30ea\u30c6\u30a3\" cellspacing=\"0\">\n<tbody>\n<tr>\n<th width=\"55%\">Max. throughput<br \/>\n(\u2113\/min)<\/th>\n<td width=\"45%\">500(when 4 ports are used)<\/td>\n<\/tr>\n<tr>\n<th>LPG flow rate<br \/>\n(\u2113\/min)<\/th>\n<td>16<\/td>\n<\/tr>\n<tr>\n<th>Cooling water flow rate<br \/>\n(\u2113\/min)<\/th>\n<td>20<\/td>\n<\/tr>\n<tr>\n<th>Instrument gas(MPa)<\/th>\n<td>0.5\uff5e0.7(minute amounts)<\/td>\n<\/tr>\n<tr>\n<th>Plant power consumption<\/th>\n<td>100V 3.4kVA<\/td>\n<\/tr>\n<tr>\n<th>Dimensions<br \/>\nW\u00d7D\u00d7H(mm)<\/th>\n<td>900\u00d71,000\u00d72,000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<p class=\"page_con_p\">* It is also possible to use utility gas as the fuel gas.<\/p>\n<\/div>\n<\/div><\/div><div id=\"panel-552-1-0-1\" class=\"so-panel widget widget_sow-editor panel-last-child\" data-index=\"3\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<h4>Flow Diagram<\/h4>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-565 size-full\" src=\"https:\/\/www.japan-pionics.co.jp\/page\/wp-content\/uploads\/image_combustion_03-1.gif\" alt=\"\" width=\"292\" height=\"294\"><\/p>\n<\/div>\n<\/div><\/div><\/div><div id=\"pgc-552-1-1\"  class=\"panel-grid-cell\" ><div id=\"panel-552-1-1-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"4\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<h4>Applicable Gases for Detoxification<\/h4>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-566 size-full\" src=\"https:\/\/www.japan-pionics.co.jp\/page\/wp-content\/uploads\/image_combustion_02-1.gif\" alt=\"\" width=\"258\" height=\"89\"><\/p>\n<p class=\"page_con_p\">*1 In this case, detoxification occurs in the PFC-type combustion waste gas cleaner.<\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><div id=\"pg-552-2\"  class=\"panel-grid panel-has-style\" ><div class=\"page_con panel-row-style panel-row-style-for-552-2\" ><div id=\"pgc-552-2-0\"  class=\"panel-grid-cell\" ><div id=\"panel-552-2-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"5\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<h2>Related products<\/h2>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><div id=\"pg-552-3\"  class=\"panel-grid panel-has-style\" ><div class=\"cat_index_con panel-row-style panel-row-style-for-552-3\" ><div id=\"pgc-552-3-0\"  class=\"panel-grid-cell\" ><div id=\"panel-552-3-0-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"6\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-27\" src=\"https:\/\/www.japan-pionics.co.jp\/page\/wp-content\/uploads\/products_exhaust_gas_p03.jpg\" alt=\"\" width=\"400\" height=\"400\"><\/p>\n<ul>\n<li><a href=\"..\/..\/exhaust_gas\/security\/\">Emergency Safety Equipment<\/a><\/li>\n<\/ul>\n<p class=\"cat_index_con_p\">The PIOCLEAN\u00ae detoxifying agent to ensure safety in an emergency is a dry type to ensure efficient treatment even under higher airflow.<\/p>\n<\/div>\n<\/div><\/div><\/div><div id=\"pgc-552-3-1\"  class=\"panel-grid-cell\" ><div id=\"panel-552-3-1-0\" class=\"so-panel widget widget_sow-editor panel-first-child panel-last-child\" data-index=\"7\" ><div\n\t\t\t\n\t\t\tclass=\"so-widget-sow-editor so-widget-sow-editor-base\"\n\t\t\t\n\t\t>\n<div class=\"siteorigin-widget-tinymce textwidget\">\n\t<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-27\" src=\"https:\/\/www.japan-pionics.co.jp\/page\/wp-content\/uploads\/products_exhaust_gas_p05.jpg\" alt=\"\" width=\"400\" height=\"400\"><\/p>\n<ul>\n<li><a href=\"..\/..\/exhaust_gas\/pfc\/\">PFC catalyst thermal decomposition equipment<\/a><\/li>\n<\/ul>\n<p class=\"cat_index_con_p\">Eliminates the need for any ancillary facility. Offers space-saving and lower-cost features.<\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div>","protected":false},"excerpt":{"rendered":"<p>The equipment is designed to detoxify the waste gases of hydrogen compounds such as SiH4 and fluorine compunds such as C2F6, WF6 generated from the semiconductor manufacturing equipment through thermal decomposition using the heated exhaust of a combustion burner. The byproducts of thermal decomposition (SiO2 powder, acid gas, etc.) are removed by the wet scrubber [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":543,"menu_order":34,"comment_status":"closed","ping_status":"closed","template":"page_cat_products_exhaust_gas.php","meta":{"_locale":"en_US","_original_post":"https:\/\/www.japan-pionics.co.jp\/page\/?page_id=74","footnotes":""},"class_list":["post-552","page","type-page","status-publish","hentry","en-US"],"_links":{"self":[{"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/pages\/552","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/comments?post=552"}],"version-history":[{"count":1,"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/pages\/552\/revisions"}],"predecessor-version":[{"id":553,"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/pages\/552\/revisions\/553"}],"up":[{"embeddable":true,"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/pages\/543"}],"wp:attachment":[{"href":"https:\/\/www.japan-pionics.co.jp\/wp-json\/wp\/v2\/media?parent=552"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}