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Normal-temperature adsorption gas purifier MODEL-VP-AN/AAR/AHE/AO/AAM/AH

MODEL-VP-AN/AAR/AHE/AO/AAM/AH

VP-Series Gas Purifiers
Japan Pionics is a pioneer of gas purifiers with the world's highest level of gas purification technology and a broad range of technologies acquired through many years of experience. The VP-Series Gas Purifiers was developed by Japan Pionics to deliver the ultimate gas purity and incorporate environmental and safety features that provide security and reliability.

Features

  1. The use of an original catalyst developed by our company allows gas purification to high levels of purity.
  2. For switching between the purification series, it is possible to set the optimal series switching time for the source gas flow rate and concentration of impurities.
    Because it is also possible to switch the series based on the total flow, the switching time is longer when lower flow speeds are used, saving energy.
  3. Space-saving installation (18% less than our other products) *1
  4. The maintenance spaces are generally in front of and behind the equipment, allowing other equipment to be installed directly on either side of this equipment. (However space for the earthquake-resistant fittings is necessary.)
  5. Conforms to standards (SEMI, ASME, ML, others).

*1 Model for comparison: VP-AN50

Equipment specifications

Model VP-AN20 VP-AN50 VP-AN1000
Standard flow rate
(m3/h(nor))
20 50 1,000
Dimensions
W×D×H(mm)
400×700×1,800 800×700×1,800 1,800×1,400×2,200
Weight (kg) 250 400 1,600

Equipment performance

Model AN,AAR,AHE AO AAM AH
Applicable gas N2,Ar,He O2 NH3 H2
Inlet Outlet Inlet Outlet Inlet Outlet Inlet Outlet

Max. pressure
(MPa)

0.8 ⊿0.1
(0.15)3
or less
0.8 ⊿0.1 or less 0.8 ⊿0.1 or less 0.8 ⊿0.1 or less
Temp. 5`35 5`35 5`35 5`35 22`35 22`35 5`35 5`35
  O2 1,000 0.1 - - 5,000 5 1,000 0.1
  CO 1,000 0.1 500 0.5 - - 1,000 1
  CO2 500 0.1 2,000 0.1 - - 500 0.1
Impurities
(vol.ppb)
H2 1,000 0.1(0.5)4 1,000 0.5 - - - -
CH4 - -2 25,000 0.1 - - - -
N2 - - - - - - - -
H2O 2,600 0.1 2,600 0.1 10,660 53 2,600 1
Particle   0.1µm
1pcs/
0.0283m3
  0.1µm
1pcs/
0.0283m3
  0.1µm
1pcs/
0.0283m3
  0.1µm
1pcs/
0.0283m3

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Inquiries for semiconductor equipment

Telephone: 81-463-53-8741 (Service hours: 10:00 - 17:00)
Facsimile: 81-463-53-8746 (24 hours)
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