Semiconductor Equipment
With our accumulated know-how and field-proven skills related to gas purification and waste gas treatment essential to the manufacturing of semiconductors, and thanks to a variety of technical innovations and cutting-edge equipment, we can meet increasingly diversified needs.
- *Pioclean Cartridge/Detecting agent
- *Waste gas cleaner for semiconductors
- *Emergency Safety Equipment
- *Combustion type waste gas cleaner
- *PFC catalyst thermal decomposition equipment
- *Ammonia decomposition and detoxifying equipment
- *Adsorption and regeneration type waste gas cleaner
- *Thermal detoxifying equipment
