GaN-MOCVD
Japan Pionics accomplished GaN-MOCVD systems with high materials efficiency.
GaN-MOCVD series, RKY-2000 and RKY-3000, contribute to the mass production of UV, blue and white LEDs.
- Heater: Uses a resistance heating type carbon heater
The structure isolates the heater from the reaction gas, extending the heater lifetime. - Susceptor: Uses both a face-down type and a planetary type with independent rotation and revolution speed ratio for high-quality film formation.
- Susceptor high-temperature automatic transfer system: Achieves high productivity by using a robot that can change the susceptor in a high temperature environment after film formation.
- Growth pressure: The growth pressure can be set to any value between 1/8 atm. to 1 atm.
- High material efficiency: Achieves a material efficiency of more than 20% under atmospheric pressure, contributing to lower running costs.
| Model | RKY-2000 | RKY-3000 |
|---|---|---|
| Number of processed substrates | ||
| 2inch | 10 | 15 |
| 3inch | 8 | 12 |
| 4inch | 7 | 11 |
| 6inch | - | 6 |
| Standard model | Expansion option | ||||
|---|---|---|---|---|---|
| I | II | III | IV | ||
| Reactors | 1 | 2 | 3 | 1 | 2 |
| Robots | 1 | 1 | 1 | 1 | 1 |
| Load lock | 1 | 1 | 1 | 1 | 1 |
| Cleaning furnaces | 0 | 0 | 0 | 1 | 1 |
For many years Japan Pionics has supplied the high-level gas purifiers and detoxification equipment that are needed for semiconductor manufacture. Based on this experience, we propose systems composed of high-level gas purifiers, detoxification equipment, and other systems with a range of capacities to match the MOCVD equipment.
