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PFC catalyst thermal decomposition equipment MODEL-WGF

PFC catalyst thermal decomposition equipment MODEL-WGF

Allows full decomposition of CF4, C2F6, C5F8 and other PFC(perfluorocarbon), and SF6 and HFC. Eliminates the need for propane and other combustion fuels for the heater heating system, thereby minimizing the emissions of CO2.

Features

  1. Eliminates the need for any ancillary facility. Offers space-saving and lower-cost features.
  2. Ensures improved safety(flame and fuel are not necessary.)
  3. Causes no NOx generation due to the relatively lower decomposition temperature.
  4. Requires no after-treatment equipment such as a wet scrubber since the catalyst component is responsible for adsorption and fixation of fluorine. Also keeps the system piping free from any possible corrosion.

Equipment performance

Max. processing capacity
[ℓ/min]
80 (including added air)
Max. PFC concentration (%) 1.0*1
PFC decomposition 99.9% or higher
CF4 processing capacity(ℓ/column) 1,500
Target harmful gases CF4, C2F6, SF6, CO, CHF3 others
  • *1 The CO concentration is 4.0%.

Utilities

Purge N2
N2(ℓ/min)
〜80
Air added(ℓ/min) 〜20
H2O added(ℓ/min) small amount
Coolant(ℓ/min) 13
System dimensions
W×D×H(mm)
1,250×1,050×2,000
(No pretreatment column)
1,500×1,050×2,000
(With pretreatment column)

Flow Diagram (With Pretreatment Column)

Flow Diagram (With Pretreatment Column)

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Inquiries for semiconductor equipment

Telephone: 81-463-53-8741 (Service hours: 10:00 - 17:00)
Facsimile: 81-463-53-8746 (24 hours)
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